Patent · US Active

Bonded system and a method for adhesively bonding a hygroscopic material

US10332814B2 · kind B2 · utility

2Cited by
4References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 18, 2016
Grant dateJun 25, 2019
Priority date
Expiry dateFeb 20, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/3025
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A bonded system includes a reconstituted wafer including a hygroscopic material. A moisture barrier layer is arranged over a surface of the reconstituted wafer. An adhesive layer is arranged over a surface of the moisture barrier opposite the reconstituted wafer. A carrier is arranged over a surface of the adhesive layer opposite the moisture barrier. The adhesive layer adhesively bonds the reconstituted wafer and the carrier together.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.