Semiconductor fuses with nanowire fuse links and fabrication methods thereof
US10332834B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 1, 2017 |
| Grant date | Jun 25, 2019 |
| Priority date | — |
| Expiry date | Mar 12, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02639
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Semiconductor fuses with nanowire fuse links and fabrication methods thereof are presented. The methods include, for instance: fabricating a semiconductor fuse, the semiconductor fuse including at least one nanowire fuse link, and the fabricating including: forming at least one nanowire, the at least one nanowire including a semiconductor material; and reacting the at least one nanowire with a metal to form the at least one nanowire fuse link of the semiconductor fuse, the at least one nanowire fuse link including a semiconductor-metal alloy. In another aspect, a structure is presented. The structure includes: a semiconductor fuse, the semiconductor fuse including: at least one nanowire fuse link, the at least one nanowire fuse link including a semiconductor-metal alloy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.