Beam focusing and reflecting optics with enhanced detector system
US10338362B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 3, 2018 |
| Grant date | Jul 2, 2019 |
| Priority date | — |
| Expiry date | Jul 3, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0636
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In ellipsometer and polarimeter systems, reflective optics including both convex and a concave mirrors that have beam reflecting surfaces, as well as aperture control of beam size to optimize operation with respect to aberration and diffraction effects while achieve the focusing of a beam of electromagnetic radiation with minimized effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved, and further including detectors of electromagnetic radiation that enable optimization of the operation thereof for application over various specific wavelength ranges, involving functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.