Methodology to generate guiding templates for directed self-assembly
US10339260B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 8, 2014 |
| Grant date | Jul 2, 2019 |
| Priority date | — |
| Expiry date | Aug 15, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F30/20
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A method of determining a characteristic of a guiding template for guiding self-assembly of block copolymer to form an entirety of a design layout, or a portion thereof, including a plurality of design features, each design feature including one or more elemental features, the method including selecting a characteristic of a guiding template for each of the one or more elemental features of the plurality of design features from a database or a computer readable non-transitory medium, the database or the computer readable non-transitory medium storing a characteristic of a guiding template for each of the one or more elemental features, and determining the characteristic of the guiding template to form the entirety of the design layout, or the portion thereof, by combining the selected characteristic of the guiding template for the one or more elemental features for each of the plurality of design features.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.