Scanning probe microscope and measurement method using the same
US10345336B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 31, 2016 |
| Grant date | Jul 9, 2019 |
| Priority date | — |
| Expiry date | Apr 13, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning probe microscope that includes a probe, a positioning unit configured to position a probe on a measurement sample, an excitation unit configured to excite the measurement sample at a predetermined frequency, a resonance unit configured to output a frequency modulation signal by converting a change of a capacitance of the measurement sample, a lock-in amplifier configured to output a differential capacitance signal obtained by extracting a predetermined frequency component and a harmonic component of the predetermined frequency of the demodulated signal, a conversion unit configured to output data indicative of a relationship between a voltage applied to the measurement sample and the capacitance, a detecting unit that detects a voltage value corresponding to a feature point of the relationship data, and a main measurement control unit that measures electrical characteristics of the measurement sample subjected to a DC bias voltage substantially equal to the feature point voltage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.