Patent · US Active

Enhanced charged particle beam processes for carbon removal

US10347463B2 · kind B2 · utility

0Cited by

19References

13Claims

0Family size

Assignee

FEI Company · US

Inventors

Chad Rue · Portland, US
Joe Christian · Portland, US
Kenny Mani · Beaverton, US
Noel Thomas Franco · Hillsboro, US

Key dates

Filing date	Dec 9, 2016
Grant date	Jul 9, 2019
Priority date	—
Expiry date	Dec 9, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/31138
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Method and system for enhanced charged particle beam processes for carbon removal. With the method and system for enhancing carbon removal, associated method and system for decreasing levels of carbon impurity in depositions, also using a precursor gas in charged particle beam processes (and particularly focused ion beam methodologies), are provided. In a preferred embodiment, the precursor gas comprises methyl nitroacetate. In alternative embodiments, the precursor gas is methyl acetate, ethyl acetate, ethyl nitroacetate, propyl acetate, propyl nitroacetate, nitro ethyl acetate, methyl methoxyacetate, or methoxy acetylchloride.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.