Determining one or more characteristics of a pattern of interest on a specimen
US10359371B2 · kind B2 · utility
3Cited by
25References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 22, 2016 |
| Grant date | Jul 23, 2019 |
| Priority date | — |
| Expiry date | Sep 24, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and systems for determining characteristic(s) of patterns of interest (POIs) are provided. One system is configured to acquire output of an inspection system generated at the POI instances without detecting defects at the POI instances. The output is then used to generate a selection of the POI instances. The system then acquires output from an output acquisition subsystem for the selected POI instances. The system also determines characteristic(s) of the POI using the output acquired from the output acquisition subsystem.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.