Integrated sensor and homologous calibration structure for resonant devices
US10386204B2 · kind B2 · utility
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17Claims
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Key dates
| Filing date | Jun 28, 2017 |
| Grant date | Aug 20, 2019 |
| Priority date | — |
| Expiry date | Jun 28, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/084
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus is provided which comprises: a substrate; a sensor including a sensing element, wherein the sensor is integrated within the substrate; and a calibration structure integrated within the substrate, wherein the calibration structure is to exhibit one or more physical or chemical properties same as the sensor but without the sensing element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.