Dual-direction chemical delivery system for ALD/CVD chambers
US10400335B2 · kind B2 · utility
345Cited by
19References
12Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 6, 2017 |
| Grant date | Sep 3, 2019 |
| Priority date | — |
| Expiry date | Dec 13, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/4259
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Provided are gas distribution apparatus with a delivery channel having an inlet end, an outlet end and a plurality of apertures spaced along the length. The inlet end is connectable to an inlet gas source and the outlet end is connectible with a vacuum source. Also provided are gas distribution apparatus with spiral delivery channels, intertwined spiral delivery channels, splitting delivery channels, merging delivery channels and shaped delivery channels in which an inlet end and outlet end are configured for rapid exchange of gas within the delivery channels.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.