Patent · US Active

Optical element having a coating for influencing heating radiation and optical arrangement

US10401540B2 · kind B2 · utility

2Cited by

0References

21Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Boris Bittner · Roth, DE
Norbert Wabra · Werneck, DE
Holger Schmidt · Wuppertal, DE
Ricarda Schoemer · Zusmarshausen, DE
Sonja Schneider · Lehrberg, DE

Key dates

Filing date	Jan 12, 2017
Grant date	Sep 3, 2019
Priority date	—
Expiry date	May 15, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG21K1/067
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The disclosure relates to an optical element, including: a substrate, a first coating, which is disposed on a first side of the substrate and is configured for reflecting radiation having a used wavelength (λEUV) in the EUV wavelength range, and a second coating, which is disposed on a second side of the substrate, for influencing heating radiation that is incident on the second side of the substrate. The disclosure also relates to an optical arrangement having at least one such optical element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.