Identifying registration errors of DSA lines
US10401841B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Sep 28, 2015 |
| Grant date | Sep 3, 2019 |
| Priority date | — |
| Expiry date | Dec 10, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/37224
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Methods and respective modules are provided, configured to identify registration errors of DSA lines with respect to guiding lines in a produced structure, by comparing a measured signature of the structure with simulated signatures corresponding to simulated structures having varying simulated characteristics, and characterizing the produced structure according to the comparison. The characterization may be carried out using electromagnetic characterization of a geometric model or in a model-free manner by analyzing model-based results. Thus, for the first time, positioning and dimensional errors of DSA lines may be measured.
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