Method of performing tomographic imaging in a charged-particle microscope
US10403469B2 · kind B2 · utility
3Cited by
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19Claims
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Key dates
| Filing date | Apr 14, 2016 |
| Grant date | Sep 3, 2019 |
| Priority date | — |
| Expiry date | Feb 23, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2815
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method is presented for sub-surface imaging of a specimen in a charged particle microscope. A series of images, with individual members In is collected, with a value of a beam parameter P varied for each image, thereby compiling a measurement set M={(In, Pn)}, with P being the focus position along the charged particle axis. The data for the images are recorded using signals from a segmented detector. The signals from segments combined and compiled to yield a vector field. Mathematical processing then deconvolves the vector field, resulting in depth-resolved imagery of the specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.