Patent · US Active

Quality estimation and improvement of imaging metrology targets

US10408602B2 · kind B2 · utility

0Cited by
3References
10Claims
0Family size

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Key dates

Filing dateApr 18, 2016
Grant dateSep 10, 2019
Priority date—
Expiry dateDec 21, 2036

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/70633
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Methods are provided, which estimate a quality of a metrology target by calculating a noise metric of its ROI kernels, derived from application of a Fourier filter on the measured kernel with respect to a periodicity of the target's periodic structure(s); and using the calculated noise metric to indicate the target quality. An additional Fourier filter may be applied perpendicularly on the measured kernel with respect to a periodicity of a perpendicular segmentation of the periodic structure(s), and the (2D) noise metric may be derived by application of both Fourier filters. The estimated noise may be analyzed statistically to provide various types of information on the target.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.