Patent · US Active

Method for illuminating an object field of a projection exposure system

US10409167B2 · kind B2 · utility

0Cited by

1References

17Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Martin Endres · Oberkochen, DE
Johannes Eisenmenger · Ulm, DE
Stig Bieling · Aalen, DE
Markus Hauf · Ulm, DE
Lars Wischmeier · Aalen, DE
Fabian Haacker · Aalen, DE

Key dates

Filing date	Aug 2, 2016
Grant date	Sep 10, 2019
Priority date	—
Expiry date	Aug 2, 2036

Classification

Technology area (CPC G)Physics
CPC primaryG02B26/0833
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method for illuminating an object field of a projection exposure apparatus includes providing a subset of first facets to be positioned in park positions, which are each spaced apart from an associated target position, but at most by a maximum distance.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.