Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS)
US10409295B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 31, 2016 |
| Grant date | Sep 10, 2019 |
| Priority date | — |
| Expiry date | Jun 14, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electronic device manufacturing system includes a mass flow controller (MFC) that has a thermal flow sensor. The thermal flow sensor may measure a mass flow rate and may include a sensor tube having an inner surface coated with a material to form an inner barrier layer. The inner barrier layer may prevent or substantially reduce the likelihood of a corrosive reaction from occurring on the inner surface, which may prevent or reduce the likelihood of the MFC drifting beyond the MFC's mass flow rate accuracy specifications. This may improve the repeatability of flow detection by the MFC. Methods of measuring and controlling a mass flow rate in an electronic device manufacturing system are also provided, as are other aspects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.