Apparatus and method to remove solids from material lift off post process solvents
US10413850B2 · kind B2 · utility
1Cited by
2References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 18, 2018 |
| Grant date | Sep 17, 2019 |
| Priority date | — |
| Expiry date | Mar 10, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67086
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus and method for removing post MLO (Material Lift Off) materials from a recycle solvent stream utilize a space efficient design and in a fashion that greatly reduces equipment downtime to maintenance and in a health friendly fashion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.