Floating conveyor and substrate processing apparatus
US10421622B2 · kind B2 · utility
0Cited by
5References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 28, 2017 |
| Grant date | Sep 24, 2019 |
| Priority date | — |
| Expiry date | Dec 28, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G2812/16
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
According to one embodiment, a floating conveyor is configured to convey a substrate while floating the substrate. The floating conveyor includes a lower floating section and an upper floating section with a conveying path of the substrate therebetween. A plurality of floating blocks that constitute at least one of the lower floating section and the upper floating section are arranged to be separated by a space, and a floating block that constitutes the other is arranged to face the space.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.