Inventor · Yokohama, JP

Akinori Iso

6Patents
2h-index
9Co-inventors
44Inventor score

Filing activity: Aug 23, 2000 → Jan 24, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US6299697A Method and apparatus for processing substrate Electricity 12 Expired
US6363950B2 Apparatus for processing substrate using process solutions having desired mixing ratios Electricity 7 Expired
US10421622B2 Floating conveyor and substrate processing apparatus Performing Operations; Transporting 0 Active
US10325787B2 Substrate processing apparatus and substrate processing method Electricity 0 Active
US12363801B2 Heat treatment device Electricity 0 Active
US11906246B2 Organic film forming apparatus Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.