Coordinate measuring machine and coordinate correction method
US10422636B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 21, 2017 |
| Grant date | Sep 24, 2019 |
| Priority date | — |
| Expiry date | Jan 15, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F17/16
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A processing device includes: a pushing drive mechanism control unit that brings a measurement tip into contact with a surface of a calibration artifact at a single point in each of five directions are all normal directions to the surface of the calibration artifact; a scanning drive mechanism control unit that reciprocates the measurement tip on the surface of the calibration artifact on each of three planes perpendicular to one another; a coordinate acquisition unit that acquires a moving amount and a probe output of a measuring probe; a matrix generation unit that generates a correction matrix; and a probe output correction unit that corrects the probe output with the correction matrix. This enables an improvement in asymmetric probe characteristics of the probe output, which is outputted from the measuring probe, in a particular plane. Thus, shape coordinates of an object to be measured can be obtained with high accuracy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.