Droplet generator steering system
US10426020B2 · kind B2 · utility
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Key dates
| Filing date | Feb 2, 2016 |
| Grant date | Sep 24, 2019 |
| Priority date | — |
| Expiry date | Feb 2, 2036 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T403/54
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
Steering system for a droplet generator in a EUV system. The steering system permits controlled positioning of a droplet release point of the droplet generator. A movable member holding the droplet generator is coupled to stationary elements of the EUV system through a coupling system having a first subsystem that constrains lateral translation of the movable member, and a second subsystem that controls a relative inclination of the movable member. The first and second subsystems preferably include one or a combination of flexures that permit highly precise and repeatable positioning.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.