Inventor · San Diego, CA, US

John M. Algots

23Patents
13h-index
74Co-inventors
80Inventor score

Filing activity: Dec 22, 1999 → Feb 2, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US6192064A Narrow band laser with fine wavelength control Electricity 135 Expired
US6671294B2 Laser spectral engineering for lithographic process Electricity 77 Expired
US7087914B2 High repetition rate laser produced plasma EUV light source Electricity 69 Expired
US6721340B1 Bandwidth control technique for a laser Electricity 56 Expired
US6757316B2 Four KHz gas discharge laser Electricity 52 Expired
US6529531B1 Fast wavelength correction technique for a laser Electricity 47 Expired
US6853653B2 Laser spectral engineering for lithographic process Electricity 44 Expired
US6532247B2 Laser wavelength control unit with piezoelectric driver Electricity 41 Expired
US7217940B2 Collector for EUV light source Electricity 40 Expired
US6904073B2 High power deep ultraviolet laser with long life optics Electricity 37 Expired
US6882674B2 Four KHz gas discharge laser system Electricity 17 Expired
US8144739B2 System method and apparatus for selecting and controlling light source bandwidth Electricity 16 Active
US6496528B2 Line narrowing unit with flexural grating mount Electricity 15 Expired
US7382815B2 Laser spectral engineering for lithographic process Electricity 13 Expired
US6650666B2 Laser wavelength control unit with piezoelectric driver Electricity 10 Expired
US7139301B2 Laser spectral engineering for lithographic process Electricity 8 Expired
US7346093B2 DUV light source optical element improvements Electricity 4 Expired
US7298770B2 Laser spectral engineering for lithographic process Electricity 3 Expired
US7079556B2 Bandwidth control technique for a laser Electricity 2 Expired
US9544983B2 Apparatus for and method of supplying target material Electricity 1 Active
USRE45249E1 System method and apparatus for selecting and controlling light source bandwidth General 0 Active
US10426020B2 Droplet generator steering system Emerging Cross-Sectional Technologies 0 Active
US9147995B2 Rapidly tunable laser source assembly with long stroke grating mover Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.