John M. Algots
23Patents
13h-index
74Co-inventors
80Inventor score
Filing activity: Dec 22, 1999 → Feb 2, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6192064A | Narrow band laser with fine wavelength control | Electricity | 135 | Expired |
| US6671294B2 | Laser spectral engineering for lithographic process | Electricity | 77 | Expired |
| US7087914B2 | High repetition rate laser produced plasma EUV light source | Electricity | 69 | Expired |
| US6721340B1 | Bandwidth control technique for a laser | Electricity | 56 | Expired |
| US6757316B2 | Four KHz gas discharge laser | Electricity | 52 | Expired |
| US6529531B1 | Fast wavelength correction technique for a laser | Electricity | 47 | Expired |
| US6853653B2 | Laser spectral engineering for lithographic process | Electricity | 44 | Expired |
| US6532247B2 | Laser wavelength control unit with piezoelectric driver | Electricity | 41 | Expired |
| US7217940B2 | Collector for EUV light source | Electricity | 40 | Expired |
| US6904073B2 | High power deep ultraviolet laser with long life optics | Electricity | 37 | Expired |
| US6882674B2 | Four KHz gas discharge laser system | Electricity | 17 | Expired |
| US8144739B2 | System method and apparatus for selecting and controlling light source bandwidth | Electricity | 16 | Active |
| US6496528B2 | Line narrowing unit with flexural grating mount | Electricity | 15 | Expired |
| US7382815B2 | Laser spectral engineering for lithographic process | Electricity | 13 | Expired |
| US6650666B2 | Laser wavelength control unit with piezoelectric driver | Electricity | 10 | Expired |
| US7139301B2 | Laser spectral engineering for lithographic process | Electricity | 8 | Expired |
| US7346093B2 | DUV light source optical element improvements | Electricity | 4 | Expired |
| US7298770B2 | Laser spectral engineering for lithographic process | Electricity | 3 | Expired |
| US7079556B2 | Bandwidth control technique for a laser | Electricity | 2 | Expired |
| US9544983B2 | Apparatus for and method of supplying target material | Electricity | 1 | Active |
| USRE45249E1 | System method and apparatus for selecting and controlling light source bandwidth | General | 0 | Active |
| US10426020B2 | Droplet generator steering system | Emerging Cross-Sectional Technologies | 0 | Active |
| US9147995B2 | Rapidly tunable laser source assembly with long stroke grating mover | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.