Pump power consumption enhancement
US10428807B2 · kind B2 · utility
1Cited by
15References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 3, 2012 |
| Grant date | Oct 1, 2019 |
| Priority date | — |
| Expiry date | Apr 6, 2036 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B49/06
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
Methods and apparatus for reducing the power consumption of a pump are provided herein. In some embodiments, a pump power consumption reduction system for use in a substrate processing system may include a vacuum chamber having an exhaust port; a valve; a first pump having a pump inlet port coupled to the exhaust port via the valve and a pump exhaust port to couple the first pump to an exhaust handling system; and a second pump coupled to the pump exhaust port to selectively reduce an exhaust pressure of the first pump.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.