Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods

US10435786B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Danny D. WANG · San Jose, US
• Jun Tae Choi · Cupertino, US
• Rupankar Choudhury · Agartala, IN
• Zhong Qiang Hua · San Jose, US
• Juan Carlos Rocha-Alvarez · Redwood City, US
• Jason Michael Lamb · Dallas, US

Key dates

• Filing date: Oct 23, 2014
• Grant date: Oct 8, 2019
• Expiry date: Jan 23, 2038

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/507
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Alignment systems employing actuators provide relative displacement between lid assemblies of process chambers and substrates, and related methods are disclosed. A process chamber includes chamber walls defining a process volume in which a substrate may be placed and the walls support a lid assembly of the process chamber. The lid assembly contains at least one of an energy source and a process gas dispenser. Moreover, an alignment system may include at least one each of a bracket, an interface member, and an actuator. By attaching the bracket to the chamber wall and securing the interface member to the lid assembly, the actuator may communicate with the bracket and the interface member to provide relative displacement between the chamber wall and the lid assembly. In this manner, the lid assembly may be positioned relative to the substrate to improve process uniformity across the substrate within the process chamber.