Danny D. WANG
5Patents
2h-index
24Co-inventors
51Inventor score
Filing activity: Aug 3, 1999 → Apr 6, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6537011B1 | Method and apparatus for transferring and supporting a substrate | Emerging Cross-Sectional Technologies | 33 | Expired |
| US6466426B1 | Method and apparatus for thermal control of a semiconductor substrate | Emerging Cross-Sectional Technologies | 28 | Expired |
| US10435786B2 | Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods | Chemistry; Metallurgy | 0 | Active |
| US10858735B2 | Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods | Chemistry; Metallurgy | 0 | Active |
| US12324061B2 | Epitaxial deposition chamber | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.