Method for parameter determination and apparatus thereof
US10444638B2 · kind B2 · utility
1Cited by
13References
13Claims
0Family size
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Key dates
| Filing date | Jul 23, 2018 |
| Grant date | Oct 15, 2019 |
| Priority date | — |
| Expiry date | Jul 23, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/02854
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus to measure overlay from images of metrology targets, images obtained using acoustic waves, for example images obtained using an acoustic microscope. The images of two targets are obtained, one image using acoustic waves and one image using optical waves, the edges of the images are determined and overlay between the two targets is obtained as the difference between the edges of the two images.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.