Alessandro Polo
17Patents
2h-index
25Co-inventors
46Inventor score
Filing activity: Mar 14, 2016 → Nov 9, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10585363B2 | Alignment system | Physics | 3 | Active |
| US10466601B2 | Alignment sensor for lithographic apparatus | Physics | 3 | Active |
| US10788766B2 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Physics | 2 | Active |
| US10678145B2 | Radiation receiving system | Physics | 1 | Active |
| US11086240B2 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Physics | 1 | Active |
| US10444638B2 | Method for parameter determination and apparatus thereof | Physics | 1 | Active |
| US10845304B2 | Scatterometer and method of scatterometry using acoustic radiation | Physics | 1 | Active |
| US10317808B2 | Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method | Physics | 1 | Active |
| US10101675B2 | Metrology apparatus, method of measuring a structure and lithographic apparatus | Physics | 1 | Active |
| US11761929B2 | Sensor apparatus for lithographic measurements | Physics | 0 | Active |
| US11099489B2 | Method of measuring a parameter of a lithographic process, metrology apparatus | Physics | 0 | Active |
| US11300892B2 | Sensor apparatus and method for lithographic measurements | Physics | 0 | Active |
| US10527959B2 | Position sensor, lithographic apparatus and method for manufacturing devices | Physics | 0 | Active |
| US11927891B2 | Apparatus and methods for determining the position of a target structure on a substrate | Physics | 0 | Active |
| US11428925B2 | Position metrology apparatus and associated optical elements | Physics | 0 | Active |
| US11333985B2 | Position sensor | Physics | 0 | Active |
| US11536654B2 | Scatterometer and method of scatterometry using acoustic radiation | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.