Balancing collector contamination of a light source by selective deposition
US10444645B1 · kind B1 · utility
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20Claims
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Key dates
| Filing date | Jul 10, 2018 |
| Grant date | Oct 15, 2019 |
| Priority date | — |
| Expiry date | Jul 10, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70916
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method includes identifying a first contamination region of a collector of a light source and enabling a subset of a plurality of temperature control elements positioned on the collector to cause a second contamination region to be formed on the collector symmetric to the first contamination region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.