Inventor · Palo Alto, CA, US

Erik Robert Hosler

11Patents
2h-index
8Co-inventors
39Inventor score

Filing activity: Dec 5, 2014 → Sep 29, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US9541839B2 Method and device for splitting a high-power light beam to provide simultaneous sub-beams to photolithography scanners Physics 3 Active
US10996564B2 Uniformity control of metal-based photoresists Electricity 2 Active
US9844124B2 Method, apparatus and system for using free-electron laser compatible EUV beam for semiconductor wafer metrology Electricity 2 Active
US9392679B2 Method, apparatus and system for using free-electron laser compatible EUV beam for semiconductor wafer processing Electricity 2 Active
US9754829B2 Self-aligned conductive polymer pattern placement error compensation layer Electricity 2 Active
US12022599B2 Polarization-multiplexed radiator system, light source system, and method of operation Electricity 1 Active
US9633942B1 Conductively doped polymer pattern placement error compensation layer Electricity 1 Active
US10444645B1 Balancing collector contamination of a light source by selective deposition Physics 0 Active
US9704807B2 Pattern placement error compensation layer Electricity 0 Active
US10748671B2 Radial lithographic source homogenizer Physics 0 Active
US9748176B2 Pattern placement error compensation layer in via opening Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.