Imaging technique in scanning transmission charged particle microscopy
US10446366B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 13, 2018 |
| Grant date | Oct 15, 2019 |
| Priority date | — |
| Expiry date | Feb 13, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2806
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An example method of imaging a specimen in a Scanning Transmission Charged Particle Microscope may include scanning a beam of charged particles across a specimen, detecting, by a segmented detector, a flux of charged particles traversing through the specimen at each scan location, for each scan location, combining detection data from different segments of the detector to produce a respective vector output, forming, based on the respective vector output data for each scan location, an imaging vector field, forming, based on the imaging vector field, an integrated vector field image, and reducing error in either the imaging vector field prior to forming the integrated vector field image or correcting the integrated vector field image, wherein the error is due to pointwise variations in beam incidence angle on the specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.