Multi-pass gas cell with mirrors in openings of cylindrical wall for IR and UV monitoring
US10451540B2 · kind B2 · utility
2Cited by
12References
15Claims
0Family size
Assignee
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Key dates
| Filing date | Jan 16, 2016 |
| Grant date | Oct 22, 2019 |
| Priority date | — |
| Expiry date | Mar 28, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0636
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A multipass cell assembly for monitoring of fluid is described, as well as fluid processing systems utilizing same, and associated methods of use of such multipass cell assembly for fluid monitoring. The multipass cell assembly is usefully employed in fluid processing operations such as monitoring of vapor deposition process reactants, e.g., reactants used for vapor deposition metallization of tungsten from a tungsten carbonyl precursor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.