Emission noise correction of a charged particle source
US10453647B2 · kind B2 · utility
3Cited by
8References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 16, 2017 |
| Grant date | Oct 22, 2019 |
| Priority date | — |
| Expiry date | Feb 16, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24535
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of operating a charged particle microscope comprising the following steps:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.