Topography simulation apparatus, topography simulation method, and topography simulation program
US10460050B2 · kind B2 · utility
0Cited by
6References
18Claims
0Family size
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Key dates
| Filing date | Sep 1, 2016 |
| Grant date | Oct 29, 2019 |
| Priority date | — |
| Expiry date | Dec 30, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG16C60/00
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A topography simulation apparatus includes a processor and a memory connected to the processor. The memory stores instructions executable by the processor to set a function indicating a position relationship between a point in a calculation region and a material surface in the calculation region. The memory stores further instructions executable by the processor to determine whether or not a particle moving in the calculation region collides with the material surface, and update a value of the function, responsive to determining that the particle collides with the material surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.