Hybrid material electrically programmable fuse and methods of forming
US10461029B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 25, 2017 |
| Grant date | Oct 29, 2019 |
| Priority date | — |
| Expiry date | Aug 25, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D62/832
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Methods of forming a hybrid electrically programmable fuse (e-fuse) structure and the hybrid e-fuse structure are disclosed. In various embodiments, the e-fuse structure includes: a substrate; an insulator layer over the substrate; a pair of contact regions overlying the insulator layer; and a silicide channel overlying the insulator layer and connecting the pair of contact regions, the silicide channel having a first portion including silicide silicon and a second portion coupled with the first portion and on a common level with the first portion, the second portion including silicide silicon germanium (SiGe) or silicide silicon phosphorous (SiP).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.