Apparatus for inspecting material property of plurality of measurement objects
US10473579B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 16, 2018 |
| Grant date | Nov 12, 2019 |
| Priority date | — |
| Expiry date | May 16, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/084
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection apparatus includes a light source. A first measurement unit is configured to receive light from the light source and direct it to a first measurement object. A second measurement unit is configured to receive the light from the light source and direct it to a second measurement object. An inspection unit is configured to receive a first optical signal provided from the first measurement unit and inspect the first measurement object using the first optical signal, and to receive a second optical signal provided from the second measurement unit and inspect the second measurement object using the second optical signal. A measurement position selection unit is configured to alternately enable the inspection of the two measurement units by adjusting an angle of a reflection mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.