Integrated circuit device testing in an inert gas
US10473712B2 · kind B2 · utility
0Cited by
3References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 27, 2016 |
| Grant date | Nov 12, 2019 |
| Priority date | — |
| Expiry date | Dec 27, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2898
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system includes an inert gas supply, a soak chamber, a test chamber, a transfer zone, and a heater. The soak chamber soaks an integrated circuit (IC) device in the inert gas prior to testing. The test chamber includes contact pins for testing the IC device in the inert gas by contacting the contact pins to leads of the IC device. The transfer zone is to transfer the IC device from the soak chamber to the test chamber. The heater heats the inert gas supplied to the soak chamber and the test chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.