Parallel test structure

US10475677B2 · kind B2 · utility

Assignee

• GlobalFoundries Inc. · KY

Inventors

• Tian Shen · Clifton Park, US
• Anil Kumar · Clifton Park, US
• Yuncheng Song · Clifton Park, US
• Kong Boon Yeap · Clifton Park, US
• Ronald G. Filippi · Wappingers Falls, US
• Linjun Cao · Ballston Lake, US
• Seungman Choi · Loudonville, US
• Cathryn J. Christiansen · Waterbury, US
• Patrick R. Justison · Clifton Park, US

Key dates

• Filing date: Aug 22, 2017
• Grant date: Nov 12, 2019
• Expiry date: Mar 30, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L22/34
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An exemplary apparatus includes a testing module connected to, and providing a test voltage to, an integrated circuit containing devices under test. The testing module performs a time-dependent dielectric breakdown (TDDB) test on the devices under test. A decoder is connected to the devices under test and the testing module. The decoder selectively connects each device being tested to the testing module. Efuses are connected to a different one of the devices under test. The efuses separately electrically disconnect each of the devices under test from the test voltage upon failure of a corresponding device under test. Protection circuits are connected between the efuses and a ground voltage. Each protection circuit provides a shunt around the decoder upon failure of the device under test.