Patent · US Active

Graphene spectral purity filter

US10481510B2 · kind B2 · utility

2Cited by
15References
27Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 8, 2018
Grant dateNov 19, 2019
Priority date—
Expiry dateMay 8, 2038

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG21K2201/061
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A pellicle that includes graphene is constructed and arranged for an EUV reticle. A multilayer mirror includes graphene as an outermost layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.