Artificially oriented piezoelectric film for integrated filters
US10483943B2 · kind B2 · utility
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8Claims
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Key dates
| Filing date | Jun 27, 2017 |
| Grant date | Nov 19, 2019 |
| Priority date | — |
| Expiry date | Sep 1, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure relates to semiconductor structures and, more particularly, to artificially oriented piezoelectric films for integrated filters and methods of manufacture. The structure includes: a piezoelectric film with effective crystalline orientations of the polar axis rotated 90 degrees from a natural orientation for planar deposited films; and a conductor pattern formed on a surface of the piezoelectric film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.