Local alignment point calibration method in die inspection
US10497538B2 · kind B2 · utility
1Cited by
1References
18Claims
0Family size
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Key dates
| Filing date | Apr 23, 2018 |
| Grant date | Dec 3, 2019 |
| Priority date | — |
| Expiry date | Apr 23, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/12
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A calibration method for calibrating the position error in the point of interest induced from the stage of the defect inspection tool is achieved by controlling the deflectors directly. The position error in the point of interest is obtained from the design layout database.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.