Load lock chamber and the cluster tool system using the same

US10497591B2 · kind B2 · utility

Assignee

• Piotech Inc. · CN

Inventors

• Ren Zhou · Fremont, US
• Xuyen Pham · Fremont, US
• Brian Lu · Fremont, US
• Sean Chang · Taoyuan, TW
• Shicai Fang · Shenyang, CN
• Jie Lian · Nanjing, CN
• Enguo Men · Shenyang, CN

Key dates

• Filing date: Sep 16, 2016
• Grant date: Dec 3, 2019
• Expiry date: Jul 8, 2037

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67201
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Disclosed is a load lock chamber which includes a chamber body including: at least one pair of cavities, defined in a layer structure of the chamber body to carry one or more wafer substrates; at least one internal conduit, defined between and coupled with the paired cavities, such that the paired cavities are communicated with each other and capable of conducting gas refilling and exhaustion; and a plurality of wafer supports for carrying the wafer substrates, the plurality of wafer supports being securely received in the paired cavities and able to calibrate with a machine arm frontend finger, wherein the wafer support includes grooves defined thereon for calibrating the machine arm frontend finger.