Inventor · Fremont, CA, US

Brian Lu

18Patents
11h-index
62Co-inventors
71Inventor score

Filing activity: Sep 26, 2003 → Oct 17, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US7265061B1 Method and apparatus for UV exposure of low dielectric constant materials for porogen removal and improved mechanical properties Electricity 573 Expired
US7208389B1 Method of porogen removal from porous low-k films using UV radiation Electricity 558 Expired
US8187951B1 CVD flowable gap fill Electricity 530 Active
US7482247B1 Conformal nanolaminate dielectric deposition and etch bag gap fill process Electricity 530 Active
US7094713B1 Methods for improving the cracking resistance of low-k dielectric materials Electricity 63 Expired
US7629227B1 CVD flowable gap fill Electricity 51 Active
US7888273B1 Density gradient-free gap fill Electricity 33 Active
US7381662B1 Methods for improving the cracking resistance of low-k dielectric materials Electricity 28 Expired
US8146530B2 Cluster tool architecture for processing a substrate Emerging Cross-Sectional Technologies 13 Active
US9257302B1 CVD flowable gap fill Electricity 13 Active
US9159608B2 Method for forming TiSiN thin film layer by using atomic layer deposition Electricity 12 Active
US8181596B2 Cluster tool architecture for processing a substrate Emerging Cross-Sectional Technologies 10 Active
US8215262B2 Cluster tool architecture for processing a substrate Emerging Cross-Sectional Technologies 10 Active
US7678709B1 Method of forming low-temperature conformal dielectric films Electricity 2 Active
US9822451B2 Device and method for manufacturing nanostructures consisting of carbon Chemistry; Metallurgy 1 Active
US9564329B2 Method and apparatus for fabricating dielectric structures Electricity 0 Active
US11224452B2 Medical assistive device for quick positioning of reduction forceps Human Necessities 0 Active
US10497591B2 Load lock chamber and the cluster tool system using the same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.