Multi-station tool with wafer transfer microclimate systems
US10515834B2 · kind B2 · utility
2Cited by
17References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 5, 2016 |
| Grant date | Dec 24, 2019 |
| Priority date | — |
| Expiry date | Jun 30, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Systems and techniques for forming buffer gas microclimates around semiconductor wafers in environments external to a semiconductor processing chamber are disclosed. Such systems may include slot doors that may allow for single wafers to be removed from a multi-wafer stack while limiting outflow of buffer gas from a multi-wafer storage system, as well as buffer gas distributors that move in tandem with robot arms used to transport wafers for at least some of the movements of such robot arms.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.