Inventor · San Lorenzo, CA, US

Efrain Quiles

8Patents
5h-index
23Co-inventors
59Inventor score

Filing activity: Apr 8, 1998 → Oct 5, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US6015465A Temperature control system for semiconductor process chamber Electricity 630 Expired
US6320736A Chuck having pressurized zones of heat transfer gas Chemistry; Metallurgy 53 Expired
US6562189B1 Plasma reactor with a tri-magnet plasma confinement apparatus Electricity 48 Expired
US7833351B2 Batch processing platform for ALD and CVD Emerging Cross-Sectional Technologies 9 Active
US8796589B2 Processing system with the dual end-effector handling Emerging Cross-Sectional Technologies 7 Active
US10515834B2 Multi-station tool with wafer transfer microclimate systems Electricity 2 Active
US6422618B1 Personal security lock for use with a camper shell of a truck Emerging Cross-Sectional Technologies 2 Expired
US10665476B2 Substrate processing system, valve assembly, and processing method Emerging Cross-Sectional Technologies 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.