Efrain Quiles
8Patents
5h-index
23Co-inventors
59Inventor score
Filing activity: Apr 8, 1998 → Oct 5, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6015465A | Temperature control system for semiconductor process chamber | Electricity | 630 | Expired |
| US6320736A | Chuck having pressurized zones of heat transfer gas | Chemistry; Metallurgy | 53 | Expired |
| US6562189B1 | Plasma reactor with a tri-magnet plasma confinement apparatus | Electricity | 48 | Expired |
| US7833351B2 | Batch processing platform for ALD and CVD | Emerging Cross-Sectional Technologies | 9 | Active |
| US8796589B2 | Processing system with the dual end-effector handling | Emerging Cross-Sectional Technologies | 7 | Active |
| US10515834B2 | Multi-station tool with wafer transfer microclimate systems | Electricity | 2 | Active |
| US6422618B1 | Personal security lock for use with a camper shell of a truck | Emerging Cross-Sectional Technologies | 2 | Expired |
| US10665476B2 | Substrate processing system, valve assembly, and processing method | Emerging Cross-Sectional Technologies | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.