Apparatus for delivering gas and illumination source for generating high harmonic radiation
US10530111B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2018 |
| Grant date | Jan 7, 2020 |
| Priority date | — |
| Expiry date | Feb 23, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/7085
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is gas delivery system which is suitable for a high harmonic generation (HHG) radiation source which may be used to generate measurement radiation for an inspection apparatus. In such a radiation source, a gas delivery element delivers gas in a first direction. The gas delivery element has an optical input and an optical input, defining an optical path running in a second direction. The first direction is arranged relative to the second direction at an angle that is not perpendicular or parallel. Also disclosed is a gas delivery element having a gas jet shaping device, or a pair of gas delivery elements, one of which delivers a second gas, such that the gas jet shaping device or second gas is operable to modify a flow profile of the gas such that the number density of the gas falls sharply.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.