Measuring method of scanning probe microscopy using penetrative pressing force
US10545170B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 11, 2016 |
| Grant date | Jan 28, 2020 |
| Priority date | — |
| Expiry date | Jun 18, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q10/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A measuring method of a scanning probe microscopy moves the probe from the first measuring point to the second measuring point while the probe has contact with the object to be measured and a pressing force weaker than the first pressing force is applied between the probe and the object to be measured after the measurement at the first measuring point has ended, applies the first pressing force between the probe and the object to be measured until the tip end position of the probe reaches the first distance in the depth direction from the upper surface of the object to be measured, and measures the physical property information of the object to be measured after the tip end position of the probe has reached the first distance in the depth direction from the upper surface of the object to be measured at the second measuring point.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.