Method and structure for flip-chip package reliability monitoring using capacitive sensors groups
US10553503B2 · kind B2 · utility
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9Claims
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Key dates
| Filing date | Oct 2, 2017 |
| Grant date | Feb 4, 2020 |
| Priority date | — |
| Expiry date | Oct 2, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/73253
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Flip-chip package reliability monitoring and systems of monitoring using capacitive sensors are disclosed. The monitoring is conducted in situ and in real-time without the need for destructive testing of the packages. The capacitive sensors can be used for flip-chip package reliability monitoring.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.