Patent · US Active

Transistor with controlled overlap of access regions

US10553702B2 · kind B2 · utility

0Cited by
1References
7Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 12, 2017
Grant dateFeb 4, 2020
Priority date
Expiry dateApr 12, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/0167
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method for producing a microelectronic device with one or more transistor(s) including forming a first gate on a region of a semiconductor layer, forming a first cavity in the semiconductor layer, the first cavity having a wall contiguous with the given region, filling the first cavity in such a way as to form a first semiconductor block wherein a source or drain region of the first transistor is capable of being produced, by epitaxial growth of a first semiconductor material in the first cavity, the growth being carried out such that a first zone of predetermined thickness of the layer of first semiconductor material lines the wall contiguous with the given region, epitaxial growth of a second zone made of a second semiconductor material on the first zone.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.