MIM capacitor containing negative capacitance material
US10566413B2 · kind B2 · utility
1Cited by
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12Claims
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Assignee
Inventors
Key dates
| Filing date | Oct 3, 2017 |
| Grant date | Feb 18, 2020 |
| Priority date | — |
| Expiry date | Oct 3, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/215
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A capacitor may include a first conductive layer forming a first capacitor plate, a second conductive layer forming a second capacitor plate, and a first insulating material on the first conductive layer. The first insulating material may include a positive capacitance material. The capacitor may further include a second insulating material disposed over the first insulating material and between the first insulating material and the second conductive layer. The second insulating material may include a negative capacitance ferroelectric material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.