Optical measuring device and method
US10571249B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 22, 2019 |
| Grant date | Feb 25, 2020 |
| Priority date | — |
| Expiry date | Jul 22, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2210/56
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a device for optical measurement of a thickness of an intransparent layer on a substrate, comprising first means for optical distance measurement configured to measure a first distance between a first reference plane and a first surface of the intransparent layer, and second means for optical distance measurement configured to measure a second distance between a second reference plane and a second surface of the intransparent layer. The second means measures a third distance between the second reference plane and a surface of the substrate. The thickness of the intransparent layer is computed from the first distance and the second distance. The measurement of the third distance is used to take into account the influence of the optical effect of the substrate on the distance measurement of the second distance. The invention also relates to a method for optical measurement of a thickness of an intransparent layer on a substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.