Method of performing tomographic imaging in a charged-particle microscope
US10573488B2 · kind B2 · utility
1Cited by
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18Claims
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Key dates
| Filing date | Jul 23, 2019 |
| Grant date | Feb 25, 2020 |
| Priority date | — |
| Expiry date | Jul 23, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2815
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of performing sub-surface imaging of a specimen in a charged-particle microscope of a scanning transmission type, comprising the following steps:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.